Development of diagnostics for characterization electron heating mechanisms in low-pressure RF discharges

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dc.contributor.authorRawat, Arti
dc.date.accessioned2024-12-26T11:35:04Z
dc.date.issued2021-10-01
dc.identifier.urihttp://ir.iitd.ac.in/handle/123456789/5941
dc.language.isoen
dc.publisherIIT Delhi
dc.subjectRF circuit
dc.subjectCalibration
dc.subjectFabrication
dc.subjectSignals
dc.subjectData analysis
dc.titleDevelopment of diagnostics for characterization electron heating mechanisms in low-pressure RF discharges
dc.typeThesis

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